Semiautomatic probe station karl suss pa200 8 inches chuck with temperature control a ccd camera replaces the microscope, and moves together with the xray tube. Everbeing c2 mini probe station karl suss pa200 semiautomatic prober, 8 karl suss pa300 semiautomatic prober, 12 karl suss pa300 semiautomatic prober, 12 parts machine karl suss pm5 analytical prober, up to 6 karl suss pm8 manual probe station, 8 karl suss psm6 probe station, 6 semics opus 2 wafer prober. Manual and motorized probe positioners for any application from dc to terahertz measurements and beyond. Karl suss probe station pm8 the pm8 probe station is configured to serve as a platform for precise probehead positioning. Karl suss pa200 probe station bare base no accessories. This listing is for 1 used karl suss pa200 semiautomatic probe station w proberbench 5. We are offering a karl suss pa200 semiautomatic probe station. We perform three different tests iv scan, cv scan and ac scan for each ladder. Karl suss pa200 probe station bridge tronic global. A new laboratory for the testing of silicon particle. Its condition is used, second hand, surplus, or refurbished. The corresponding jv characteristics are presented in figures 5ac. Suss microtec is a leading supplier of process equipment for microstructuring in the semiconductor industry and related markets with 70 years of engineering experience.
However, it assumes that the writer of a prober driver is already familiar with programming in c. Pa200 karl suss semiautomatic probe system the suss pa200 semiautomatic probe system is available as two versions, one for high speed hs and one for high resolution hr applications. This manual probe station is extremely stable, with a large probe platen, and a lowprofile design. Karl suss pm8 probe station incomplete the pm8 probe station is configured to serve as a platform for precise probehead positioning. This guide contains information about installing, verifying, operating, and maintaining your probe station. Find karl suss pa200 probe station bare base no accessories, surplus store at ventura california 888 4886550 call toll free.
The mmw modules are small and lightweight enough to be mounted on the micropositioners associated with semiautomatic or manual probe stations. Karl suss pa200 probe station proberbench operating systemjoystick controller and power supplyqty. We plan to analyze the mems designs we create with the design analisys evaluation software memspro, intellisuite and ansys. Suss microtec semiconductor equipment manufacturer. It works most of the time but sometimes it fails and the only way i know how to restore this function is to quit labview and restart. The suss pa200 semiautomatic probe system is available as two versions, one for.
The micromanipulator p200l 200mm semiautomatic probe station. All the tests are performed with a karl suss pa200 semiautomatic probe station. Guide contents this guide covers hardware installation, operation, and maintenance for the summit 1 and 12000series probe stations. Now the laboratory is equipped with two such stations, an older one of karl suss pa200 type, and with a brand new probe station tesla. Dark box joystick controller thermo chuck karl suss pa200pb mitutoyo m. Whether you need a replacement probe tip or a full probe station, you need quality, accuracy and reliability in your lab, especially when you are sourcing used or secondhand equipment. Suss microtec is a leading supplier of process equipment for microstructuring in the semiconductor industry and related markets with 70 years of engineering. In addition to this karl suss ph150, capovani brothers inc. Our portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding and photomask processing, complemented by microoptical components. This unit has scuffs and scratches throughout the body, as well as corrosion and deep ingrained dirt. Karl suss dresden 25005383 probe head arm isolated psm 6 varian. It has multitoyo optics and a 6 inch chuck room temp.
The faulty location of the deviceundertest can be isolated by internal signal acquisition through an active probe. This is a for sale ad about karl suss pa200 semiautomatic prober wafer karl suss, cascade microtech, hypervision pa200 pa200 and visionary 2000. Probe station karl suss pm8 user manual university of tokyo. Suss pm8 probe station to perform electrical characterization of your waferchips. Karl suss pa 200 semi automatic probe station for sale by sdi group. Karl suss pa200, refurbished for sale from gce market, inc. Xacttest probe station automation software solution. Karl suss type pa200 semiautomatic probe station lab controller 0159. On the other hand, asterix accommodates a s emiautomatic probe station karl suss pa200 installed inside the cabinet. Switch on the agilent 4155c parameter analyser, the panasonic ccd camera and monitor, and the microscope lamp. This item has a mitutoyo head with a m plan apo 100. Application note writing prober drivers for the series. Figure 2 shows a complete onwafer measurement solution comprised of the me7808a vna integrated with a karl suss pa200 probe.
The 12000series probe station comes with the following. You need to know that your cascade probe station or microtech system is up to the task and will provide consistent, precise readings every time. With 70 years of engineering experience suss microtec is a leading supplier of process equipment for microstructuring in the semiconductor industry and related markets. Direct to the optional netprobe 7 software to unleash the power of an. Nano nanometers massachusetts institute of technology.
The core instrument of the laboratory is the probe station, which makes it possible to automatically contact different points of the sensor and to measure its electrical properties. Cascade probe positioners for dc, rf and optical wafer. Suss microtec reman used semiconductor manual aligner. A graphical user interface provided by the renowned suss proberbench software makes the pa200 a fully functional, flexible yet simple tool where various setups can be stored for individual tasks. You can find a very basic operation manual for the measurement of iv characteristic in the annex of this document. Control suss pa200 with labview ni community national. Cascade probe positioners for dc, rf and optical wafer test. No other accessories are being sold with the item cables, manuals, software, etc. I query the controller with readprobestatus using visa write to sent the command then visa read to read it back with a 120ms delay between writeread. In addition to this karl suss som4, capovani brothers inc stocks a wide range of used and refurbished analytical wafer probers. During failure analysis, the faulty location of the deviceundertest can be isolated by internal signal acquisition through an active probe.
Description karl suss pa 200 semiautomatic probe station assy, 532266, 210aa007402, pa200, md2057600, ps 01, rc2344, vo 3608, wafer, chuck, laser. At bid service, we source, restore and refurbish used. The suss pa 200 semiautomatic prober is a very accurate and. Karl suss microtec pa 200 prober used for sale price. Lithography wafer bonding device bonding testing manual probe station pm8 your needs pm8 solutions flexibility stability ease of use ideal for fa, wlr, hf and mems extensive accessories available, such as laser cutters and wide range of equipment for hf testing works with probe cards andor packaged parts. I am trying to look for the instrument driver of the suss pa200 or some example codes in order for me to create a labview program to control the chuck and scope of suss pa200 with rs232 interface. The suss pa200 semiautomatic probe system meets these challenges through innovative design, precision and reliability. Wafer probing semiconductor test cascade microtech, inc. Semiautomatic probe station with dark box, semiconductor device analyzer and lcr meter.
The system is composed of an xray machine seifert rp149, a semiautomatic wafer prober karl suss pa200 mounting a thermal chuck of 8 inches whose movement is controlled from outside the cabinet, a cooling element to set and maintain the temperature of the chuck att systems c200, a ccd camera, and a system to lower the dew point inside the irradiation cabinet using dry air from the. Board index pa200 pa200 product page pa200 user manual. The userfriendly software makes even complex test routines easy to. Includes temperature controlled chuck and electronics cabinet. Manual wafer probe station dcoax probe stations custom. Except for the beam size, the two tubes are identical. Cascade microtech customers use our products for advanced wafer probing, in both engineering and production semiconductor test environments.
A new laboratory for the testing of silicon particle detectors has. Karl suss pa 200 semiautomatic probe station assy, 532266. In the last few decades, the probe stations have evolved from user friendly measurement tools into the large and expensive measurement tools that require training in new software and nonintuitive controls. It is still installed in a cleanroom and fully functional. Welcome to the summit 1 and 12000series probe station users guide. The mpi ts150thz engineering probe system is dedicated for the precise analysis of substrates and 150 mm wafers in the sub thz range cost effective tests. Variations of these series are available, such as the 150mm 6inch probe station, and those stations with hightemperature ht configurations. Open up the cover over the probe s blocks left and right of the chuck, fig. Computer assembly the basic components needed to operate the pa 200 microsoft windows software are. Formfactors leadingedge stations, probes, probe cards, advanced thermal. Typical manufacturers include karl suss, micromanipulator, signatone, and wentworth labs. Suss microtec karl suss pa200 semiautomatic probe station. An analytical probe station karl suss equipment shown in the figure below was purchased in june 2001.
Gpib motion control issue page 2 ni community national. We offer a complete line of premium performance analytical probe stations for onwafer probing and board test that help increase process performance while reducing cost of ownership. Please contact us for the following manuals we have available. Our portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding and photomask processing, complemented by. Karl suss ma150 mask aligner with cassette to cassette automatic wafer handling. User manual for suss pa200 probe station ce marked serial number. Model 4200scs semiconductor characterization system application note series this application note provides all the information needed to write a prober driver for keithleys model 4200scs semiconductor characterization system.
Karl suss type pa200 semiautomatic probe station lab controller. Choices are fake prober, manual prober, micromanipulator 8860 prober, karl suss pa200 prober, cascade 12000 prober, and signatone cm500 prober. Prober karl suss pa200 semiauto probe station with. Pa200 semiautomatic probe system with agilent b1500a sda and agilent 4284a precision lcr meter. Xacttest probe station control software solution microxact. Measurements if you have experience with semiconductor device parameter analyzer, in particular keysight b1500a, you may try to use it by yourself, with much care. Formfactor delivers access to electrical data from wafers, ics, ic packages, circuit borads and modules, mems, 3d tsv, led devices and more. Rather than requiring user fees, it is funded by cbas research programs for use by participating researchers, with additional available time shared with collaborating programs. Prober karl suss pa200 semiauto probe station with proberbench 5. The automated systems are driven by microxacts xacttest probe station software. The tools are grouped by nano, micro, meso, and macro feature sizes, and. Engineered for high stability and accuracy, formfactors positioners are the perfect match to your 150mm, 200mm or 300mm probe station and enable precise, backlashfree and repeatable probe tip placements from simple ivcv measurements to highly challenging measurement tasks.
Please contact us for the following manuals we have available for sale. Now the laboratory is equipped with two such stations, an older one of karl suss pa200 type, and with a brand new probe station. Formfactor is a leading supplier of solutions that enable precision measurements of integrated circuits at the wafer level. Click here for video tutorials on the cascade velox probe station control software. Mits center for bits and atoms manages a research facility for making and measuring things on length scales from atoms to buildings. Subassemblies of the suss pa 200 istituto nazionale di. You can also visit our website and see our web brochure for a full configuration including picture. Karl suss probe station pm8 this item has been sold, we have an extensive inventory of systems and spares in stock, please use the menu to the left and select the equipment group for the item you need. This manual probe station is used to measure iv characteristics of thin film devices. The user friendly software makes even complex test routines easy to.
Karl suss manual probe station analytical wafer prober. Karl suss pa200 probe station for sale high karl suss pa200 probe station for sale. Suss microtec offers a wide product portfolio of high quality process solutions for the semiconductor industry and related markets. Connecting 4200 to probe station tektronix and keithley. Pm5 manual probe station wafersubstrate size up to 6150 diameter x, y, theta stage. Cascade microtech rhm06 probe station with olympus sz60 microscope. They are both very stable, modular and flexible probe systems for wafers and substrates up to 200 mm 8. The summit 12000series 200mm 8inch probe stations are referred to in this manual as the 12000series. Karl suss pa200 equipment cae find the best deals on karl suss pa200, or send us a request for an item and we will contact you with matches available for sale. I need to check when the probes are not moving on a suss microtec ph600 xyz motorized translation stages. The pa200b and the mitutoyo illuminator both turn on. Hi, i am currently working with a semiautomatic probe station, suss pa200. A prober must interface to an array of hardware and software instruments. Our probe systems are available with a complete set of accessories such as microscopes, thermal control systems, software and industryleading probes.
Characterizationcustom built vacuum chamber with computer controlled gas dosing and turbomolecular pumphp 4195 network analyzeragilent 4294 impedance analyzerpolytec differential laser doppler vibrometer, interfaced with vacuum chamber karl suss pm5 probe station agilent e3631a power supplies. Call or email us for full configuration, pictures, and pricing. Karl suss pa200 semiautomatic probe station with proberbench 5. The suss pm5 is the most costeffective and simple, yet.
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